ST98HP and ST98UP Mass Flow Meters for High Purity Air and Gas Applications

Mass Flow Meter Summary

The ST98 High and Ultra High Purity mass flowmeters are ideally suited for the pharmaceutical, biotech, food & beverage and semiconductor industries. FCI's thermal dispersion technology provides exceptionally accurate and repeatable indications of mass flow rate. The sensing element combines two matched precision resistance temperature detectors (platinum RTDs). The active RTD is preferentially heated with a constant current. The reference RTD is preferentially heated with a constant current. The reference RTD senses at the process fluid temperature. As flow passes the element a resistance differential is produced proportional to the mass flow rate.

Applications
High purity gas monitoring	Condenser/evaporator flow control
Pill coater air flow monitoring	Scrubber gas discharge monitoring
CIP and SIP flow and temperature monitoring	Process flow measurement and monitoring